Effects of Annealing Treatment on Microstructures of Cu-Mo Alloy Films
Journal Title: 河南科技大学学报(自然科学版) - Year 2018, Vol 39, Issue 2
Abstract
Cu-Mo alloy thin films were deposited on flexible polyimide ( PI) substrate by magnetron sputtering method.The Cu-Mo alloy thin films were annealed in situ vacuum at different temperatures. The composition, phase structure and surface morphology of the thin films, before and after annealing, were characterized by Xray, field emission scanning electron microscopy and energy dispersive spectrometer. The effects of annealing treatment on the microstructure of the alloy film were analyzed, and the formation mechanism of Cu particles on the surface of the Cu-21.3% Mo alloy films after annealing was anslyzed. The results show that the microstructure of the alloy films is changed significantly after annealing.A large number of uniformly distributed copper particles with the size of tens of nanometers to hundreds of nanometers grow spontaneously on the surface of the annealed Cu-21. 3% Mo alloy films. Furthermore, as the annealing temperature gradually increases, the number of particles on the surface of the alloy film gradually increase.
Authors and Affiliations
Mengjie HE, Yaxing LI, Delong ZHAO, Haoliang SUN, Guangxin WANG
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