Ellipsometry of hybrid noble metal-dielectric nanostructures
Journal Title: Semiconductor Physics, Quantum Electronics and Optoelectronics - Year 2018, Vol 21, Issue 4
Abstract
Angular ellipsometric measurements of thin Ag, Cu films covered by HfO 2 protective layer were performed. The ellipsometric parameters ψ and ∆ were measured in θ = 43°...85° light incidence angle range, where ψ is the azimuth of restored linear polarization, ∆ is the phase shift between p- and s-components of reflected light. For comparison, thin Au film (traditional sensor for surface plasmon resonance (SPR)) was examined as well. The curve ∆(θ) for all the samples investigated falls down with increasing angle of light incidence, while ψ(θ) changes relatively weakly. It has been ascertained that the increase in the thickness of HfO 2 layer affects the tan(ψ) value, while tan(ψ) deviation is mainly determined by the type of metallic film. With the growth of HfO 2 layer, the minimum position of tan(ψ) shifts to smaller angles. From these angular dependences, one could choose the appropriate SPR-compatible structure due to maximal deviation of tan(ψ). To optimize layer thickness for a high SPR-response, spectral measurements and additional calculations are required.
Authors and Affiliations
A. L. Yampolskiy
Keywords
Related Articles
- EP ID EP476668
- DOI 10.15407/spqeo21.04.412
- Views 92
- Downloads 0
Fluorescence of molecules placed near a spherical particle: Rabi splitting
Theoretical study of spontaneously emitted spectra of point-like source placed near spherical Ag particle was performed. It was shown that near-field electromagnetic interaction between a point-like emitter and spherical...
Enhanced optical transmission of the triple-layer resonant waveguide structure
In this paper, we propose and demonstrate a novel guided-mode resonant filter based on a metallic grating sandwiched between two dielectric layers for TE polarization. A theoretical model based on rigorous coupled wave a...
Van der Waals interaction between surface and particle with giant polarizability
We show that a nanoparticle with a “giant” polarizability (i.e., with the polarizability volume significantly exceeding the particle volume) placed in the vicinity of a surface experiences a strongly increased van der Wa...
Optical properties of graphene film growing on a thin copper layer
Optical properties and surface structure of graphene films grown on thin 1-μm copper layer using the chemical vapor deposition method were investigated applying spectroscopic ellipsometry and nanoscopic measurements. Ang...
The influence of physical and technological magnetron sputtering modes on the structure and optical properties of CdS and CdTe films
To create technology for preparation of CdS and CdTe thin films by direct current magnetron sputtering, the influence of physical and technological condensation modes on the crystal structure and optical properties of th...