Analysis of the effects of the dimensions and type of micro pump on the pull-in voltage caused by the vibration of the diaphragm in contact with fluids
Journal Title: Journal of Science and today’s world - Year 2016, Vol 5, Issue 5
Abstract
Nowadays because of the advancement of technology, and the ever-increasing inclination toward small equipment, many researches regarding micro and Nano systems have been performed. The current study is about Micro Electro-Mechanical Systems (MEMS). The micro pump is modeled to analyze its vibrational behavior. And, pressure caused by the fluid adjacent to the structure is modeled. Finally, the changes in pull-in voltages caused by the vibrations of the rounded diaphragm in contact with the fluid in various dimensions and types of micro pumps are analyzed. The micro pump under analysis contains a cylindrical chamber with rigid walls and bottom, and a in-out valve, and a micro-elastic rounded plane in the upper part that is stimulated by electrostatic force. Because of the presence of fluid in the chamber, the rounded diaphragm is in contact with the fluid, and therefore the issue considered is the interference of the structure and the fluid. Furthermore, for modeling the active fluid, the viscosity and compressibility of the fluid is ignored, and the linear Bernoulli equation was used to calculate the pressure caused by the fluid on the micro plane. Initially, the system’s frequency response, in the form of a matrix, was extracted by applying a constant voltage and using the Fourier-Bessel method, and the effects of bias voltage and different fluids on the frequency behavior of the system was analyzed. Considering that during the operation of the micro pump (harmonic stimulation of the diaphragm) the instability of the system is possible, before analyzing the analysis of the frequency behavior of the system, the transient behavior and the instability threshold of the system was analyzed. In the above analysis it was shown the behavior of the system and its stability threshold follows the geometric dimensions and the type of active fluid.
Authors and Affiliations
S. Ghafarpour, R. Shabani
Keywords
Related Articles
- EP ID EP29617
- DOI -
- Views 369
- Downloads 5
On the Comparative Study of Multiple Intelligences in “Gifted” and “Public” High Schools
This present study is a comparative study of multiple intelligences between the students of gifted high schools and the students of public high schools. It was implemented on 400 high school students to investigate the...
Statistical Analysis on Achaemenid Ceramics in the Teppe Daroughe Khouzestan, Iran
Excavation in Tappe Daroughe Khouzestan led to recognition of Achaemenid period in this hill. The most important findings in this hill include a high number of pot shreds, all of which have been investigated with respe...
The Modeling between Motivational strategies and Learning Strategies with Academic Achievement Undergraduate Students of NAJA military's Science University
The present study seeks to investigate the relationship between motivational strategies and learning strategies with academic achievement of undergraduate students of NAJA University. Research method was descriptive app...
A study of the performance of investment funds in Iran based on Jensen’s criterion
In this study, the regulated procedure based on risk of portfolio performance (Jensen’s Alpha) has been adopted and it estimates how much the manager’s forecasting power results in fund’s profit. This procedure is based...
The Relationship Between the Perceived Value & Swimming Pools Customers’ Satisfaction in The City of Tabriz, Iran
The purpose of this study is to investigate the relationship between the perceived value & swimming pools customers’ satisfaction in the city of Tabriz, Iran. The statistical population were consisted of men and women o...