Analysis of the effects of the dimensions and type of micro pump on the pull-in voltage caused by the vibration of the diaphragm in contact with fluids
Journal Title: Journal of Science and today’s world - Year 2016, Vol 5, Issue 5
Abstract
Nowadays because of the advancement of technology, and the ever-increasing inclination toward small equipment, many researches regarding micro and Nano systems have been performed. The current study is about Micro Electro-Mechanical Systems (MEMS). The micro pump is modeled to analyze its vibrational behavior. And, pressure caused by the fluid adjacent to the structure is modeled. Finally, the changes in pull-in voltages caused by the vibrations of the rounded diaphragm in contact with the fluid in various dimensions and types of micro pumps are analyzed. The micro pump under analysis contains a cylindrical chamber with rigid walls and bottom, and a in-out valve, and a micro-elastic rounded plane in the upper part that is stimulated by electrostatic force. Because of the presence of fluid in the chamber, the rounded diaphragm is in contact with the fluid, and therefore the issue considered is the interference of the structure and the fluid. Furthermore, for modeling the active fluid, the viscosity and compressibility of the fluid is ignored, and the linear Bernoulli equation was used to calculate the pressure caused by the fluid on the micro plane. Initially, the system’s frequency response, in the form of a matrix, was extracted by applying a constant voltage and using the Fourier-Bessel method, and the effects of bias voltage and different fluids on the frequency behavior of the system was analyzed. Considering that during the operation of the micro pump (harmonic stimulation of the diaphragm) the instability of the system is possible, before analyzing the analysis of the frequency behavior of the system, the transient behavior and the instability threshold of the system was analyzed. In the above analysis it was shown the behavior of the system and its stability threshold follows the geometric dimensions and the type of active fluid.
Authors and Affiliations
S. Ghafarpour, R. Shabani
Keywords
Related Articles
- EP ID EP29617
- DOI -
- Views 376
- Downloads 5
The Effect of Mechanical Vs. Non-mechanical teaching of Comparative Adjectives on Iranian High School EFL Learners’ Knowledge of Comparative Adjectives
The current study was done to compare the effectiveness of two approaches in teaching comparative adjectives to the Iranian high school grade1 students: mechanical vs. non-mechanical approach To understand the change ha...
The information content of the non- operating component of income as related to income prediction and equity valuation
The present study provides evidence concerning various features of the non- operative component of income (net income minus operative income). Analysis of different features of the non- operative component of income is...
Optimal Design of Annular Lattice Structures
In this paper, the weight optimization of annular lattice composite structures (cylindrical and conical) has been investigated. First the governing equations are derived to achieve the stiffness matrix, regarding the g...
The Legal System Governing Public and Private Sectors in the Economy of Iran
Today, economics and law are so interdependent and interactive that it cannot be easily ignored. Today's jurists, on the one hand, endeavor to analyze law using economic instruments, and on the other hand through provid...
The effect of teaching cognitive strategies on problem-solving performance of female and male students in fifth grade math course in Kahnouj city primary schools
In the current study, the effect of teaching cognitive strategies on problem-solving performance of fifth grade math students was evaluated. To achieve this goal, 120 students, male and female, from primary schools of K...