DESCRIPTION OF DAMAGES OF THE DLC LAYER ON THE Si SUBSTRATE WITH REGISTRATION OF AE SIGNAL

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DESCRIPTION OF DAMAGES OF THE DLC LAYER ON THE Si SUBSTRATE WITH REGISTRATION OF AE SIGNAL

Journal Title: Tribologia - Year 2009, Vol 224, Issue 2

Abstract

This paper presents the results of the measurements of microindentation using Vickers’ indenter. The research was carried out with the following system: the DLC (Diamond Like Carbon) layer deposited on silicon substrate. At the same time, the measurements of microindentation acoustic emission signals were recorded. The results of microindentation forces in the form of load-displacement curves and registered AE-time characteristics of the AE signals were compared with the SEM images of indentation. During the measurements, "pop-in" effects were observed as discontinuities of the loading curve, which correlate with AE impulses. A rise of the maximal load resulted in the increase of damage and caused multiplication of AE pulses. Due to the fact the DLC layer was thin, most AE pulses were generated during the damaging of Si substrate. The thin layer of DLC increased mechanical resistance to damage.<br/><br/>

Authors and Affiliations

Anna Piątkowska

Keywords

EP ID EP516564
DOI -
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